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PlanarPad™ Pad
Our CMP polishing pad is engineered with advanced, proprietary non-porous pad material technology. This innovation ensures a consistent removal rate profile, thereby substantially enhancing the durability and extending the operational lifespan of the polishing pad.
PlanarDisk™ Pad Conditioner
Our cutting-edge CVD film pad conditioner is engineered for an extended operational lifespan, is metal-free, and delivers exceptionally good defect performance."
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